Q01. What is recommended operating environment for XY stage?
・ Recommended operating environment: Temperature 10〜50℃, Humidity 20〜70％ (w/o dew condensation).
・ Precision is guaranteed if product is used in environment with: Temperature 22±5℃, Humidity 20〜70％ (w/o condensation).
Q02. Is it possible to use stages in a vacuum?
Unfortunately, precision can not be guaranteed in this environment. We do have a track record of delivering a linear ball system stage with vacuum grease to one of our customer who used the stage under 10-4Pa vacuum pressure.
- Linear Ball System Stage
The vacuum grease is not applicable as standard option.
In order to sustain precision of linear ball system stage, standard and vacuum grease should not be mixed. Only way to remove the standard grease is to use cleaning solution and rinse away the grease, before applying vacuum grease. If this is acceptable procedure, Misumi can deliver a product with vacuum grease .
- Dovetail Stages/Cross Roller System Stage
It is necessary to remove a black anodize as surface finish if unit is to be used in the vacuum environment due to outgases. Misumi can not except special orders due to high cost.
- Influence of grease vaporization
Grease will vaporize at pressure of 6.4X10-11Pa and temperature of 20°C, or at 5.6X10-6Pa at temperature of 100°C.
(1000hPa=105Pa in regular atmospheric pressure)
Q03. Allowable moment load
The allowable moment load is defined as 1/3 of its maximum load value.
Maximum load value can be measured under the following conditions:
1) No decrease in stage performance
2) Stage automatically returns to its starting specs after load is released (stage maintains its straightness).
Q04. What is Moment Rigidity?
Stage strength to support load that is off center of the stage. (Unit: sec/N・cm)
It indicates a tilting angle (sec) of the table surface when 1N is loaded in 1cm of stage/table peripheral location (off-centered).
Moment rigidity is measured in three directions (X-axis rotation, Y-axis rotation and Z-axis rotation) for Linear Stage.
Q05. What is Maximum Load?
It is the maximum load that the stage can withstand (Static Load).
Some of the stage precision characteristics are not necessarily guaranteed under the maximum load.
Q06. What is Straightness?
It is a deviation from ideal straight line along axis (a line between start and end points) for full stroke of linear stage.
Deviation is either horizontal or vertical displacement from the ideal axis (straight line)
Q07. What is Parallelism? What is Running Parallelism?
Parallelism measures the tilt of upper table/surface against lower table/surface of the stage. [Unit：micrometer]
Running parallelism measures the tilt of moving upper axis against lower table/surface of the stage. [Unit：micrometer / full stoke]
Q08. What is Perpendicularity? What is Running Perpendicularity?
Perpendicularity measures orthogonality of table surface against installed surface. [Unit：micrometer]
Running perpendicularity measures orthogonality of moving axis against installed surface.[Unit：micrometer / full stoke]
Q09. What is XY Perpendicularity?
It measures orthogonality of Y moving axis against X moving axis.[Unit：micrometer / full stoke]
Q10. What type of grease is used with precision stages?
Different type of grease is used with Misumi precision stages:
Linear Ball System Stage: environment-friendly grease, AFF grease by THK.
Cross Roller System Stage: Shell Albania Grease No.2 by the Showa Shell Sekiyu.
Dovetail Stages, Goniometer Stages, Revolving Stages: Optic specialized grease "S-40" by Sugiura Kenkyusho.
Micrometer Head: Nigu-Ace by Nippon Grease.